Indexing rotatable chuck for a probe station

ABSTRACT

A rotary chuck with indexed rotation promotes rapid rotation of a device under test and increases the productivity of a probe station on which the device is being tested. A device mounting member of a rotatable chuck is supported for rotation on a first surface of a base until a vacuum is applied drawing the device mounting member into contact with a second surface of the base and constraining the device mounting member against rotation.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation of application Ser. No. 10/179,796, filed Jun.24, 2002 now U.S. Pat. No. 6,771,090 which is a continuation ofapplication Ser. No. 09/564,591, filed May 3, 2000, now U.S. Pat. No.6,483,336.

BACKGROUND OF THE INVENTION

The present invention relates to a chuck for a probe station and, moreparticularly, to an indexing, rotatable chuck for securing a deviceunder test in a probe station.

Integrated circuits (ICs) comprise micro-circuits chemically etched onsemiconductor material or wafers. It is customary to manufacture severalICs on a single wafer and then separate the individual circuits afterperformance and functional testing in a wafer probe station. Probestations are also used for testing the performance and function of an ICafter the IC has been incorporated into a composite device.

Generally, a probe station comprises an environmental chamber containinga chuck for securing and positioning the device under test (DUT), one ormore probes to connect test points on the DUT with instrumentation, andoptics to assist the operator in locating and probing test points on theIC. The environmental chamber protects the DUT and the delicate probesfrom electrical and other environmental hazards. The chuck provides themechanism for securing and positioning the DUT. The chuck may alsoinclude means to further control the local operating environment, suchas heating and cooling capabilities and additional electromagnetic fieldisolation. To test a device, the probe station operator examines thedevice under a microscope and, using positioning mechanisms for thechuck and probes, brings a probe tip into contact with a test point onthe DUT. The test points on ICs are customarily laid out alongrectangular grid coordinates and may be tested with multiple probes on aprobe card or by single probes in a north-south-east-west arrangement.Likewise, ICs in a composite device are typically arranged alongrectangular coordinates.

To facilitate co-location of the probe tip and the test point on theDUT, both the probe and the chuck may be capable of movement in severaldirections. The chuck is typically mounted on a movable stage providinghorizontal (x and y axes) and vertical (z axis) translation. Inaddition, the stage may provide for rotation about the z axis or “thetaangle” adjustment to facilitate parallel alignment of the probe tips andthe test points on the IC. Typically, the mounting for the probeprovides for x, y, and z movement of the probe tips with micrometerprecision.

While test points are commonly arranged in a rectilinear gridarrangement on the IC, a sequence of tests may require probingpluralities of test points that are not arranged along the same xy axis.Even if test points on an IC are laid out with efficient probing inmind, the test points for devices containing multiple ICs are likely notto be conveniently arranged. As a result, either the DUT must be rotatedon the chuck or the probe card must be removed and rotated to reorientthe probe tips between tests. In addition to the time and effortrequired to reorient the DUT or the probe card, reorientation of theprobes may require time consuming re-calibration of the attachedinstrumentation. The time required to reorient the probe and test pointscan be reduced by providing for rotation of the chuck about the vertical(z) axis (theta rotation).

Rotational movement in the form of “fine” theta adjustment is typicallyprovided in probe station chucks. The fine theta adjustment is used toensure that an array of DUTs are aligned with the x and y axis of theprobe station so that the probe can step from device to device withoutfurther adjustment. The fine theta rotation is typically limited toabout plus or minus seven and one half degrees (±7.5°) and the rotationspeed is relatively slow to facilitate alignment of the microscopicprobe tips and test points. Therefore, the fine theta adjustmentmechanism is not adequate or convenient for rotating the DUT throughsubstantial angles, often 90 degrees or more, to accommodatereorientation of test points for a sequence of tests.

Roch, U.S. Pat. No. 3,936,743, HIGH SPEED PRECISION CHUCK ASSEMBLY,discloses a rotating chuck for a wafer probe station. The chuckcomprises a platform having a stem portion arranged for rotation in abearing in a housing bore. The chuck is rotated manually by turning anadjustment knob and attached worm gear. The worm gear engages a spurgear attached to the rotating platform of the chuck. Although thismechanism permits rotation of the surface of the chuck to facilitatereorientation of the DUT, the worm gear drive adds mass to the chuckincreasing wear and tear on the positioning mechanism of the stage andmaking accurate positioning by the stage more difficult. In addition,the planarity of the mounting surface is dependent upon theperpendicularity of the supporting stem and corresponding bore in thesupport structure. Since positioning is performed while observing theDUT under a microscope, even slight deviation in planar orientation orplanarity can result in a need to routinely refocus the optics whilepositioning the DUT for probing. The worm gear mechanism also increasesthe height of the chuck which may dictate that the stage, optics, andenvironmental chamber of the probe station be specially designed toaccommodate the rotating chuck. Further, while the worm gear driveprovides continuous rotation of the DUT for precise re-alignment, itdoes not provide the rapid and convenient positioning of the DUT to anew test position which is important to productive probe testing.

Boucher et al., U.S. Pat. No. 5,676,360, MACHINE TOOL ROTARY TABLELOCKING APPARATUS, disclose another worm gear driven rotary table. Thistable is adapted for use with a dicing saw. The planar orientation ofthe surface of the table is established by the orientation of the shafton which the table rotates relative to the top surface of the table. Asa result, the bearings supporting the table for rotation are widelyspaced increasing the height of the table. The table does incorporate abrake to lock the table in a selected rotational position. Fluidpressure urges a circular piston to bear on a ledge on the periphery ofthe rotating table. Since the piston is free to assume any positionrelative to the table's base, application of the brake does notstabilize the table or effect its planar orientation. Further, a moremassive table is required to resist deflection resulting fromapplication of the brake force on the table's periphery.

What is desired, therefore, is a compact rotating chuck featuringrigidity, low mass, and precise planarity while facilitating rapid andaccurate rotation of the DUT through a substantial angle for sequentialprobing of IC test points.

SUMMARY OF THE INVENTION

The present invention overcomes the aforementioned drawbacks of theprior art by providing a chuck for a probe station comprising a baseattached to the probe station; a shaft mounted for rotation in the base;and a device mounting member affixed to the shaft for rotation therewithand having a planar orientation relative to said base substantiallyindependent of the orientation of the shaft to the device mountingmember. A large diameter resilient seal between the base and the devicemounting member supports the device mounting member independent of thealignment of the shaft promoting rigidity and consistent planarity.Further, this method of support reduces the length of the shaft and,consequently, the height and mass of the rotary chuck. In addition, therotary chuck can include a releasable rotation stop to permit indexedrotation of the device mounting member to a new test position. Inanother embodiment, a chuck for a probe station comprises a baseattached to the probe station and a device mounting member constrainedby the base for rotation relative thereto.

The foregoing and other objectives, features and advantages of theinvention will be more readily understood upon consideration of thefollowing detailed description of the invention, taken in conjunctionwith the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is perspective illustration of an exemplary probe station andchuck.

FIG. 2 is a cross section of an indexing, rotatable chuck.

FIG. 3 is a cross section of an indexing rotatable chuck of alternativeconstruction.

FIG. 4 is a fragmentary view of a cross section of an indexing,rotatable chuck arranged for braking by a pressurized fluid.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Referring to FIG. 1, in a probe station 10 a device under test (DUT) ismounted on a chuck 12 which is supported on a movable stage 14 mountedon a station base 16. Probes (not illustrated) are supported over thechuck by a platen 18. The probes are provided with controls forpositioning along horizontal (x and y) axes and the platen 18 may beadjusted in the vertical (z) direction to bring the probes into contactwith test points on the integrated circuit of the DUT. To facilitatelocation and positioning of the probes, the probe station 10 includes amicroscope (not illustrated) mounted on a microscope mounting 20attached to an optics bridge 22. The probe station 10 may include anenvironmental housing (not illustrated) to protect the DUT and probesfrom dust and other environmental hazards.

To facilitate relative positioning of the DUT and probes, the stage 14provides for translatory and limited rotational (theta) movement of thechuck 12. In the probe station 10 illustrated in FIG. 1, horizontaltranslation is accomplished with an x-motor 24 and a y-motor 26 thatdrive linear actuators 28 and 30 to move the stage 14. A similarmechanism (not shown) provides vertical translation of the chuck 12.Rotation about the vertical axis or fine theta adjustment is provided bya theta motor 32 and attached linear actuator 34. The fine thetaadjustment is provided to facilitate parallelism of the probe tips andtest points. Rotation is typically limited to approximately 15 degrees(±7.5°). Rotational speed is relatively slow to facilitate alignment ofthe microscopic probe tips and test points. One or more linear encoders36 provide feedback to a control for the stage positioning motors.

Referring to FIG. 2, the chuck 12 of the present invention comprises adevice mounting member 50 attached to a shaft 52 that is mounted forrotation in a bushing 54 installed in a bore in a base 56. A retainingring 57 secures the shaft 52 in the bushing 54. The base 56 is securedto a planarization plate 58 which is, in turn, attached to the stage 14of the probe station 10 as illustrated in FIG. 1. The base 56 isattached to the planarization plate 58 by an arrangement of mountingscrews 60 and a plurality of spring washers 62 retained by each of themounting screws 60. The spring washers 62 are interposed between thebase 56 and the planarization plate 58 and exert a force to separate thebase 56 and the planarization plate 58. The planarity of the uppersurface of the device mounting member 50, relative to the structure ofthe probe station 10, can be adjusted by loosening or tightening one ormore of the base mounting screws 60.

A handle (not illustrated) can be installed in the device mountingmember 50 for convenient manual rotation of the device mounting member50. The base 56 and the rotating device mounting member 50 can beprovided with corresponding markings to indicate the angle of rotation.Manual rotation provides rapid and reliable rotation of the devicemounting member 50 but rotation could be powered by a motor and asuitable drive train (not illustrated). Positioning of a powered devicemounting member 50 can be controlled by a known motor controller androtary position feedback device.

In the embodiment of the chuck 12 in FIG. 2, a device under test (DUT)64 is secured to a mounting fixture 66 by clamps 68. The mountingfixture 66 is, in turn, secured to the device mounting member 50 by adovetail that mates with a corresponding dovetail groove in the devicemounting member 50.

Other methods of securing the DUT 64 could be used. For example, wafersare often retained on the surface of a chuck by vacuum means. Apertures(not illustrated) provided in the upper surface of the device mountingmember 50 can be connected to a vacuum source (not illustrated) througha rotating union (not illustrated) and passageways in the devicemounting member 50 and shaft 52. When the vacuum source is connected tothe passageways, air pressure will restrain the DUT on the upper surfaceof the device mounting member 50.

Since the test points of ICs are typically arranged along rectangularcoordinates, rotation of the DUT in 90 degree or quadrature incrementsis commonly required during testing. The inventors concluded that rapidrotation of the DUT 64 to a precise, but approximate, theta anglefollowed by fine theta angle adjustment to align the probes and contactpoints would substantially improve the productivity of the probestation. The chuck 12 of the present invention includes a mechanicalindexing apparatus to speed precise rotation of the device mountingmember 50 to a new position. A rotation stop 71 is provided toreleasably index or limit the rotation of the device mounting member 50.A first example of a rotation stop 71 comprises a stop member 70 in theform of a manually operated indexing pin that slidably engages a bore inthe device mounting member 50 and, in an extended position, engages oneof a plurality of bores 74 or other surfaces of the base 56. Theindexing pin 70 is biased to an extended position by a spring 72. Torotate the device mounting member 50, the indexing pin 70 is retractedfrom the bore 74 in the base 56, freeing the device mounting member 50for rotation. The indexing pin 70 may be retained in a retractedposition by a second motion, such as a quarter turn rotation of the pin,providing chuck rotation without indexing. While the rectilineararrangement of test points on ICs makes rotation in 90 degree orquadrature increments convenient in many applications, indexing in otherangular increments is possible by providing pin receiving bores 74 atother or additional locations in the base 56. The rotation stop couldtake other forms comprising a stop member 70 movably mounted to oneelement, either the device mounting member 50, the shaft 52 or the base56, and engaging another element of the chuck 12. For example, theindexing pin stop member 70 could be slidably mounted in a bore in thebase 56 and engage bores or surfaces in the device mounting member 50.Alternative examples of a rotation stop, include a flip-up arm stopmember or a spring loaded plunger or ball detent stop member engagingfeatures of the device mounting member 50, the shaft 52, or the base 56.For example, referring to FIG. 3, an alternative example of a rotationstop 103 releasably limiting rotation of the device mounting member 92comprises a ball stop member 104 movable in a bore in the base 94 andurged into contact with an indentation in a surface of the devicemounting member 92 by a spring 102.

The rotatable chuck 12 of the present invention also includes arotational braking and stabilization system. The system permits lockingthe device mounting member 50 in an infinite number of rotationalpositions. In addition, the system promotes stability and planarity ofthe DUT 64 during testing, increasing the productivity of the probestation by reducing required microscope adjustments. The stability andplanarity of the device mounting member 50 are improved by supportingthe device mounting member at widely separated points with a resilientmember 76, for example a large diameter o-ring. The o-ring 76 isinstalled in an o-ring groove in the lower surface of the devicemounting member 50 and bears on the upper surface 55 of the base 56exerting a separating force between the device mounting member 50 andthe base 52. During rotation, the device mounting member 50 is supportedacross a substantial portion of its diameter by the resilient, largediameter o-ring 76 producing a stable mounting for the DUT 64. Further,the planar orientation of the device mounting member 50 is not dependenton the orientation of the mounting shaft 52 relative to the devicemounting member. Widely separated bearings and a long shaft are notrequired, reducing the height of the chuck 12.

Additional o-ring vacuum seals 78 and 80 are installed in o-ring groovesin the shaft 52 to seal between the shaft 52 and the bushing 54. Theo-ring vacuum seals 76, 78, and 80 form a sealed chamber 82 between thedevice mounting member 50 and the base 56. A passageway 84 in the base56 connects the sealed chamber 82 to a pressure control comprising avacuum source 85 and a control valve 86. When the control valve 86 isactuated, air flows from the sealed chamber 82 to the vacuum source 85and air pressure acting on the device mounting member 50 urges thedevice mounting member 50 toward contact with the base 56. In otherwords, the device mounting member 52, the base 56, and the seals 78, 80,and 76 form an actuator responsive to changes in fluid pressure.Friction between the device mounting member 50, the o-ring seal 76, andthe base 56 retards rotation of the device mounting member 50 and locksit into position. The resilient member, o-ring 76, is compressed as thedevice mounting member 50 and base 56 are pressed together and thedevice mounting member 50 is supported over a substantial portion of itssurface area when the brake is applied. The planar orientation of theupper surface of the base 56 is adjusted with the screws 60 that supportthe base on the planarization plate 58. The planar orientation orplanarity of the upper surface of the device mounting member 50 isdetermined by parallelism of the upper and lower surfaces of the devicemounting member 50 and is not dependent upon the orientation of theshaft 52 relative to the device mounting member 50. As a result, thedeviation in the planar orientation of the mounting for the device undertest is minimized by the ability to control the parallelism of the topand bottom surfaces of the device mounting member 50 and a relativelyshort shaft 52 can be used to mount the device mounting member 50minimizing the height of the rotary chuck. Minimizing deviation of theplanar orientation of the device mounting member 50 and, consequently,the DUT avoids frequent refocusing of the optics as the DUT is rotatedor translated. Minimizing the height of the rotating chuck makes itpossible to install the chuck 12 in a probe station designed for anon-rotating chuck.

Referring to FIG. 3, in an alternative construction the device mountingmember 92 of the chuck 90 is supported for rotation on the surface 93 ofthe base 94 without a central shaft. An o-ring seal 96 mounted in ano-ring groove in a surface 95 in an extension of the base 94 bears onthe periphery 91 of the device mounting member to journal the devicemounting member 92 for rotation. During rotation the device mountingmember 92 is supported by the base 94 across the diameter of the devicemounting member 92 providing rigid support and stable planarorientation. A second o-ring 98 seals an annular volume between an uppersurface of the device mounting member 92 and the extension of the base94. When vacuum is applied to the sealed annular volume through apassageway 100, the device mounting member 92 is drawn upward toward theextension of the base 94, compressing the o-ring 98. As a result,braking force is applied over an annular area approximating the diameterof the upper surface of the device mounting member 92 and the planarityof the device mounting member is determined by the flatness of thissurface. Approximate indexing of the rotation of the device mountingmember is provided by a ball detent comprising a spring 102 that urges aball 104 into contact with an indentation in the lower surface of thedevice mounting member 92. In addition, a locating pin 106 having aconical tip is slidably arranged in a bore in the device mounting member92. The locating pin 106 is retained in a retracted position by a spring108 that is retained by a snap ring 110. The locating pin 106 is sealedby an o-ring 112. When a vacuum is applied to the chamber formed by thedevice mounting member 92 and the base 94, the locating pin 106 is drawninto contact with a conical shaped indentation 114 in the devicemounting member providing final rotational alignment of the devicemounting member 92.

Vacuum is a convenient energy source for actuating the braking andstabilizing system because vacuum is often used to secure wafers andother DUTs on the chuck. However, increased fluid pressure can be usedto actuate the braking and stabilization mechanism. As illustrated inFIG. 4, the large diameter o-ring seal 120 can be installed in a sealring 122 affixed to the periphery of the base 56. A second o-ring 124may be used to seal between the seal ring 122 and the base 56. The seals91 and 90 in conjunction with seals on the shaft (not illustrated) forma sealed fluid chamber 126 between the device mounting plate 50 and thebase 56. When pressurized fluid is directed to the chamber 126, theupper surface of the device mounting plate 50 is pressed upward againstthe seal 120 and seal ring 122. With this arrangement, the planarity ofthe upper surface of the device mounting member 50 is determined by theflatness of that surface.

All the references cited herein are incorporated by reference.

The terms and expressions that have been employed in the foregoingspecification are used as terms of description and not of limitation,and there is no intention, in the use of such terms and expressions, ofexcluding equivalents of the features shown and described or portionsthereof, it being recognized that the scope of the invention is definedand limited only by the claims that follow.

1. A chuck for a probe station, said chuck comprising: (a) a base attached to said probe station, said base comprising a first base surface and a second base surface spaced above said first base surface; and (b) a device mounting member disposed between said first base surface and said second base surface and comprising a first mounting member surface and a second mounting member surface, said device mounting member rotatable relative to said base when said first mounting member surface and said first base surface are in contact and constrained against rotation when said second mounting member surface and said second base surface are in contact.
 2. The chuck of claim 1 further comprising a seal defining a sealed volume between said base and said device mounting member, said sealed volume selectively connectable to a vacuum to cause said second mounting member surface to contact said second base surface.
 3. The chuck of claim 2 further comprising an indexing member movable by said selective connection of said sealed volume to said vacuum from a first position in contact one of said base and said device mounting member to a second position of simultaneous contact with said base and said device mounting member. 